About us

scia Systems is a German full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for coating, etching and cleaning processes in the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as research and development environments.
Due to their flexible and modular design, the systems can be configured according to customer specific requirements. Amongst others by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support.
Technology Portfolio

  • Ion Beam Trimming (IBT)
  • Ion Beam Etching and Milling (IBE/IBM)
  • Dual Ion Beam Sputtering (DIBS)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Reactive Ion Etching (RIE)
  • Magnetron Sputtering
  • Dry Cleaning

Products and services

scia Systems offers equipment for several coating, etching and cleaning processes, used for the following applications:

  • Multilayer deposition (X-ray mirrors, high- and anti-reflective coatings)
  • Etching of optical gratings or DLC coating on large areas
  • Structuring of sensors (Infrared)
  • Large area multilayer coating of x-ray optics
  • High quality cleaning and qualification
  • Polishing error correction of optics
scia Coat 200

Dual ion beam sputtering system for substrates up to 200 mm. A rotational target holder allows in-situ change of up to 5 different target materials.

Further reading

scia Cube 750

System for RIE and PECVD processes on substrates up to 750 mm x 750 mm. The system enables large area processing with an array of synchronized linear microwave sources.

Further reading

scia Mill 150

Ion Beam Etching system for full surface etching with tiltable and rotatable substrate holder for etching angle adjustment. Compact design usable for both, small scale production as well as research and development.

Further reading

scia Systems GmbH
Annaberger Str. 240
09125 Chemnitz

Phone: +49 371 5347780
Fax: +49 371 5347781
Internet: www.scia-systems.com
E-mail: Send message

Contact person

Karl Gündel
Technical Sales Manager
E-mail: Send message

PACE Analytical Systems
C/o A.P.E.Research Lab No.120, Material Research Center Indian Institute of Science Bangalore
56012 Bangalore

Internet: www.paceanalytical.in
E-mail: Send message

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