EITRE^®

An easy-to-use semi-automated and affordable range of tools for substrate sizes up to 8” x 8”, allowing pattern replication on the micro- and nanometer scale. The EITRE^® systems are particularly versatile because of the multiple imprint process capabilities and the wide range of configuration possibilities.

EITRE^® Large Substrates

Nanoimprint tool for substrates up to 500 x 500 mm. This semi-automated tool enables high accuracy patterns with resolutions down to 50 nm  to be replicated large substrates with excellent repeatability. The system offers the highest possible flexibility using different imprint processes in the same equipment, allowing a wide range of materials to be used.

SINDRE^® Integra

A fully automated nanoimprint lithography tool suitable for high-volume manufacturing within several application areas with throughput of up to 70 WPH. Allows for imprint size up to 12” wafers. Because of its high repeatability, low maintenance cost and high yield the SINDRE^® Integra tool provides a competitive Cost-of-Ownership

SINDRE^® Litho Track

Fully integrated and automated NIL system with substrate clean, coat and thermal processing in one and the same tool and with throughput up to 30 WPH. Allows for imprint sizes up to 12” wafers and larger substrates on request.

Semi-automatic stand-alone tools for coating and developing. The Quickstep tools represents a cost efficient range of tools for 200 or 300 mm wafers or for large substrates up to 1500 mm in diameter. The Quickstep tools are versatile with a wide range of configuration possibilities.

The Obducat Quickstep Wet tools are stand-alone wet processing tools for cleaning, lift-off, etching or developing. A wide selection of options make these tools highly configurable to fit the customer needs in processing a 200- and 300 mm wafers as well as large substrates up to 1500 mm in diameter.

MICROCLUSTER

The Microcluster tool is available in 200- or 300-mm versions and is a fully automated cassette-to-cassette coater developer. The Microcluster tool is configured with four modules and offers high flexibility and represents the ideal configuration for R&D and pilot production needs meeting industry requirements with excellent uniformity and process repeatability

MICROCLUSTER TRACK

The Microcluster Track tools are available in 200-, 300- or up to 1500 mm versions and are fully automated cassette-to-cassette coater developers. The Microcluster tool is configured with five modules or more and giving it a high level of versatility and adaptability which makes it very suitable for High Volume Manufacturing needs meeting industry requirements with superior uptime, process repeatability, high yield and competitive Cost-of-Ownership.

Obducat can act as your manufacturing partner for continuous production if you follow a fabless strategy. Obducat also offer the service to do initial pilot production for evaluation purposes, to enable a more data driven investment decision for the setup of your own internal production capability.

Main offerings:

. Comprehensive Processing
All processes available up to 200 mm substrate size.

. Full Capability Range
From substrate preparation and lithography processes to advanced pattern transfer.

. Scalable Production
Supporting prototyping to high-volume manufacturing.

MICROCLUSTER WET

The Microcluster WET tool is available in 200- or 300-mm versions and is a fully automated cassette-to-cassette wet processing solution. The Microcluster WET tool is configured with four modules which can be dedicated to performing cleaning-, lift-off-, etching- or developing processes. The Microcluster WET tools offers high flexibility and represents the ideal configuration for R&D and pilot production needs meeting industry requirements with

MICROCLUSTER WET TRACK

The Microcluster WET Track tools are available in 200-, 300- or up to 1500 mm versions and are fully automated cassette-to-cassette wet processing solutions. The Microcluster WET tools are configured with five modules or more which can be dedicated to performing cleaning-, lift-off-, etching- or developing processes. The Microcluster WET Track tools offers a high level of versatility and adaptability which makes it very suitable for High Volume Manufacturing needs meeting industry requirements with superior uptime, process repeatability, high yield and competitive Cost-of-Ownership