MICROCLUSTER

The Microcluster tool is available in 200- or 300-mm versions and is a fully automated cassette-to-cassette coater developer. The Microcluster tool is configured with four modules and offers high flexibility and represents the ideal configuration for R&D and pilot production needs meeting industry requirements with excellent uniformity and process repeatability

MICROCLUSTER TRACK

The Microcluster Track tools are available in 200-, 300- or up to 1500 mm versions and are fully automated cassette-to-cassette coater developers. The Microcluster tool is configured with five modules or more and giving it a high level of versatility and adaptability which makes it very suitable for High Volume Manufacturing needs meeting industry requirements with superior uptime, process repeatability, high yield and competitive Cost-of-Ownership.