MICROCLUSTER WET

The Microcluster WET tool is available in 200- or 300-mm versions and is a fully automated cassette-to-cassette wet processing solution. The Microcluster WET tool is configured with four modules which can be dedicated to performing cleaning-, lift-off-, etching- or developing processes. The Microcluster WET tools offers high flexibility and represents the ideal configuration for R&D and pilot production needs meeting industry requirements with

MICROCLUSTER WET TRACK

The Microcluster WET Track tools are available in 200-, 300- or up to 1500 mm versions and are fully automated cassette-to-cassette wet processing solutions. The Microcluster WET tools are configured with five modules or more which can be dedicated to performing cleaning-, lift-off-, etching- or developing processes. The Microcluster WET Track tools offers a high level of versatility and adaptability which makes it very suitable for High Volume Manufacturing needs meeting industry requirements with superior uptime, process repeatability, high yield and competitive Cost-of-Ownership